Semiconductor
Semiconductor & Advanced Manufacturing
Particle-free, residue-free VHP decontamination for the next generation of American semiconductor fabrication.
Market Context
A new era of American semiconductor manufacturing.
The CHIPS and Science Act is driving tens of billions of dollars in new domestic semiconductor fabrication investment. Every new fab — and every expansion of existing capacity — requires cleanroom decontamination protocols that meet the extreme standards of semiconductor manufacturing.
This isn't pharmaceutical cleanroom decontamination applied to a different building. Semiconductor fabrication demands a fundamentally higher standard: particle-free, residue-free, compatible with the most sensitive equipment ever manufactured.
$52.7B
CHIPS Act federal investment in domestic semiconductor manufacturing and research
30+
Years of cleanroom decontamination expertise applied to the most demanding environments
Zero
Residue left on wafer-contact surfaces — VHP decomposes to H₂O and O₂
VHP for Semiconductor
Engineered for extreme cleanliness.
PuroGen's VHP platforms address the specific requirements of semiconductor fabrication environments.
Particle-Free Decontamination
VHP in the gas phase generates zero particulate matter during the decontamination cycle — critical in environments where nanometer-scale contamination renders entire wafer lots unusable.
Residue-Free Process
Hydrogen peroxide decomposes to water and oxygen. No residue on wafer-contact surfaces, lithography equipment, or metrology tools. No post-decontamination cleaning required.
Equipment Compatibility
Compatible with the materials found in semiconductor fabrication environments — stainless steel, anodized aluminum, quartz, PTFE, and the polymers used in wafer handling systems.
Programmable Precision
SteriFlex's parametric control allows decontamination cycles to be tuned for specific cleanroom classifications, tool geometries, and contamination profiles unique to each fab.
Positioning
Early entrant in a scaling market.
PuroGen brings deep cleanroom decontamination expertise — rooted in pharmaceutical and medical device sterilization — to the semiconductor industry at the moment of its most significant domestic expansion. The principles that validated VHP for pharmaceutical manufacturing and medical device sterilization apply directly — and more demanding — to semiconductor fabrication.
This is an emerging vertical for PuroGen, and the timing is deliberate. As new fabs come online across the United States, PuroGen is positioned to define the decontamination standard for the next generation of American semiconductor manufacturing.
Explore semiconductor decontamination partnerships.
Semiconductor manufacturers, fab operators, and facility designers can engage PuroGen's engineering team directly on decontamination requirements.